FMM501D Digital Mass Flowmeter Controller

FMM501D mass flow controller is used for precise measurement and control of the mass flow of gas. They play an important role in scientific research and production in the fields of semiconductor and integrated circuit industry, special materials, chemical industry, industry, medicine, environmental protection and vacuum lamps. Typical applications include: electronic process equipment, such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, ion implantation; and coating equipment, optical fiber melting, micro-reaction device, mixed gas distribution system, capillary measurement Gas chromatograph and other analytical instruments.

Parameter :

Range 0~2SCCM-200SLM
Accuracy ±1% F.S
temperature ±1℃
Linear ±0.5% F.S℃
Repeatability 0.2% F.S℃
Response time <2s <1s
Analog 0-5v/4-20mA
Communication RS485 Modbus RTU
Power supply ±15V/24V
Working temp 0-50℃
Differential pressure Dp: 0.05-1.0MPa press drop: <30Kpa
Max pressure 3Mpa/10Mpa
Electrical connection DB15
Leakage rate 1×10-8 SCCSHe
Temp C.F ±0.015% F.S/℃
Base material 316 SST
Fitting 1/4″ 3/8″ 6mm 10mm

Leave a Reply

Your email address will not be published. Required fields are marked *